Comparison ledger
Applied Materials 0010-03254 E Chuck, Ulvac Enviro Downstream Microwave, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0010-03254 E ChuckApplied Materials | |
|---|---|---|
| OEM | Applied Materials | Ulvac |
| Category | — | — |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | — | Ulvac Enviro Downstream Microwave |
| Specifications | ||
| Equipment type | — | Downstream Microwave Asher[1] |
| Wafer size | — | 8 inch[1] |
| Configured wafer size | — | 6 inch wafers[2] |
| System configuration | — | Single Chamber Advanced Strip System[2] |
| Included component | — | Computer[2] |
| Included documentation | — | Manuals[2] |
| Year | — | 2004[3] |
| OEM | — | Ulvac[1] |
| Model | — | Enviro[1] |
| Wafer sizes | — | 8 inch[1] |
| System type | — | Single Chamber Advanced Strip System[2] |
| RF generator | — | ENI OEM-6B RF Generator[2] |
| MFCs | — | 5[2] |
| Robot | — | Brooks Robot[2] |
| Pump/Blower | — | Edwards IQ Pump/Blower[2] |
| Manuals | — | Included[2] |
| Type | — | Downstream Microwave Asher[1] |
| Chamber | — | Single[2] |
| Wafer Size | — | 8 inch (supported)[1] |
| RF Generator | — | ENI OEM-6B[2] |
| Mass Flow Controllers | — | 5[2] |
| Computer | — | Included[2] |
| Year of unit | — | 2004[4] |