Waferpedia

Comparison ledger

0010-03254 E Chuckversus270 S 6 1 E ML SRD

Applied Materials 0010-03254 E Chuck, Semitool 270 S 6 1 E ML SRD, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0010-03254 E ChuckApplied Materials
OEMApplied MaterialsSemitool
Category——
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
Family—Semitool 270 S 6 1 E ML SRD
Specifications
Type—Spin Rinse Dryer (SRD)[1]
Wafer Size—6 inch[1]
Model Designation—270 S 6 1 E ML[1]
Unit Vintage—2002[1]
Sources (1)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing