Comparison ledger
Applied Materials 0010-03254 E Chuck, Lam Research SEZ SP 4300 Single Wafer Processing, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0010-03254 E ChuckApplied Materials | SEZ SP 4300 Single Wafer ProcessingLam Research |
|---|---|---|
| OEM | Applied Materials | Lam Research |
| Category | — | — |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | — | Lam Research SEZ SP 4300 Single Wafer Processing |
| Specifications | ||
| Product Type | — | Single wafer wet chemical processor / spin etcher[1] |
| Make | — | Lam / SEZ[2] |
| Manufacturer (stated) | — | SEZ[1] |
| Wafer Size | — | 300 mm (12 in)[1] |
| Number of Chambers | — | 4[1] |
| Number of Chemical Handling Cabinets (CHC) | — | 2 (internal)[1] |
| Number of Load Ports | — | 4 FOUP[1] |
| Year of Manufacture (this unit) | — | 2003[1] |