Comparison ledger
Applied Materials 0010-03254 E Chuck, Lam Research 2080 TCU Chiller, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0010-03254 E ChuckApplied Materials | 2080 TCU ChillerLam Research |
|---|---|---|
| OEM | Applied Materials | Lam Research |
| Category | — | — |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | 1998 Vintage date |
| Control system | — | — |
| Generation | — | — |
| Family | — | Lam Research 2080 TCU Chiller |
| Specifications | ||
| Description | — | Dual Channel Chiller[1] |
| Manufacturer | — | Lam Research[1] |
| Model | — | 2080 TCU[1] |
| Height | — | 55.25 in (140.34 cm)[1] |
| Width | — | 23.75 in (60.33 cm)[1] |
| Depth | — | 37.75 in (95.89 cm)[1] |
| Weight (empty reservoirs) | — | 616 lbs (279.42 kg)[1] |
| Weight (full reservoirs) | — | 690 lbs (312.98 kg)[1] |
| Upper channel temperature range | — | -15 to +80 °C[1] |
| Lower channel temperature range | — | -20 to +80 °C[1] |
| Temperature regulation | — | ±1 °C (±0.3 °C typical) at rated static load[1] |
| Setpoint resolution | — | ±0.1 °C[1] |
| Cooling power (lower channel at -20°C) | — | 1000 W (3415 BTU/hr)[1] |
| Cooling power (upper channel at -15°C) | — | 750 W (2561 BTU/hr)[1] |
| Heating power (upper/lower channel) | — | 1600 W (5464 BTU/hr)[1] |
| Reservoir capacity (per reservoir) | — | 4.23 gallons (16 liters)[1] |
| Ambient operating temperature | — | +10 to +40 °C[1] |
| Coolant composition | — | 50/50 mixture of DI water and ethylene glycol (specific gravity 1.065 ±0.005)[1] |
| Power requirements | — | 3-phase 208/230VAC at 50-60 Hz, 30 A with 10 kA Icu[1] |
| Fuses (EMO circuit) | — | (2) 1A, 250V SLO BLO[1] |
| Fuses (power supply) | — | (1) 0.75A, 250V SLO BLO[1] |
| Sound pressure level | — | <75 dBA[1] |
| Refrigerant type | — | R404A[1] |
| CE mark | — | Yes[1] |
| Lam part number | — | 851-110195-020D[1] |
| Country of origin | — | USA[1] |