Waferpedia

Comparison ledger

0010-03254 E ChuckversusFlexus F 2320 I Stress Measurement

Applied Materials 0010-03254 E Chuck, KLA Flexus F 2320 I Stress Measurement, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0010-03254 E ChuckApplied Materials
OEMApplied MaterialsKLA
Category——
Wafer size—6"
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones—1991 Vintage
Control system——
Generation——
Family—KLA Flexus F 2320 I Stress Measurement
Specifications
Configuration—Dual Wavelength[1]
Software Version—2.0[1]
Operating System—MS-DOS V6.22[1]
Voltage—115V[1]
Current—10A[1]
Wafer size—This system comes with an alignment/centering ring for a 6" wafer[1]
Wafer Sizes—6 inch, 8 inch[1]
Vintage—1991[1]
Measurement—Dual Wavelength[1]
Sources (1)Every fact above is drawn from these public sources
  1. [1]inventory listing