Comparison ledger
Applied Materials 0010-03254 E Chuck, Edwards RV12, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0010-03254 E ChuckApplied Materials | RV12Edwards |
|---|---|---|
| OEM | Applied Materials | Edwards |
| Category | — | — |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | Legacy |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | — | Edwards RV12 |
| Specifications | ||
| Type | — | vacuum pump[1] |
| Model designation in manual | — | EDWARDS RV12 (50 HZ)[1] |
| Pump type | — | Two-stage, oil-sealed, sliding-vane vacuum pump[2] |
| Inlet port | — | NW25[2] |
| Outlet port | — | NW25[2] |
| Controls | — | Mode selector and gas-ballast control[2] |
| Gas-ballast positions | — | Closed (0), low flow (I), high flow (II)[2] |
| Operating temperature range | — | 12 to 40 °C[2] |
| Weight without oil | — | 26 kg / 58 lb[3] |
| Electrical supply | — | 1-phase 110-120 V or 220-240 V, 50 or 60 Hz; 3-phase 200-230 V or 380-460 V, 50 or 60 Hz[3] |
| Motor power | — | 450 W at 50 Hz; 550 W at 60 Hz[3] |
| Oil capacity | — | Minimum 0.65 liter; maximum 1.0 liter[3] |
| Recommended oil | — | Ultragrade 19[3] |
| Ultimate vacuum | — | 2 x 10^-3 mbar / 1.5 x 10^-3 Torr in high vacuum mode with gas ballast closed[3] |