Waferpedia

Comparison ledger

ATC 2036 Eversus0010-13622 RF Match for

AJA ATC 2036 E, Applied Materials 0010-13622 RF Match for, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0010-13622 RF Match forApplied Materials
OEMAJAApplied Materials
CategoryDepositionDeposition
Wafer size15-20” adjustable length from source to wafer—
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyAJA ATCApplied Materials 0010-13622 RF Match for
Specifications
Wafer size15-20” adjustable length from source to wafer[1]—
ConfigurationTemescal Multu-Pocket Rotary E-Beam Source[1]High Efficiency HE RF Match-Bias[2]
Chamber FrontDouble hinged door with locking mechanism[1]—
Model—0010-13622[2]
Product Type—RF Match for PVD (Physical Vapor Deposition)[2]
Feature—High Efficiency HE RF Match-Bias[2]

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing