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Comparison ledger

A3CVversus0020 12458 Part

AJA A3CV, Applied Materials 0020 12458 Part, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
A3CVAJA
0020 12458 PartApplied Materials
OEMAJAApplied Materials
CategoryDepositionDeposition
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyAJA A3CVApplied Materials 0020 12458 Part
Cited variants
  • A3CV series[1]
  • 2" version[1]
  • 2.5" version[1]
  • 3" magnetic material version[1]
  • 2" module[1]
  • magnetic version core[1]
  • magnetic version module[1]
  • 2 in version[1]
  • 2.5 in version[1]
  • 3 in magnetic material version[1]
  • 2 in module[1]
—
Specifications
Source seriesA3CV series[1]—
Typemagnetron sputtering sources[1]—
Mounting versionsHV and UHV mounting versions[1]—
CompatibilityRF and DC compatible[1]—
Target architecturemultiple target modules onto a common source head subassembly[1]—
Target sizes mentionedlarge magnetic, small precious metal, standard size, and custom size targets[1]—
Optional featuresgas injection chimneys, source head tilt gimbals, integral shutters, and power supplies[1]—
Magnet arrayAJA modular magnet array[1]—
source typemagnetron sputtering sources[1]—
module flexibilityfits multiple target modules onto a common source head subassembly[1]—
magnet arrayunique modular magnet array[1]—
RF and DC compatibilityYes[1]—
Integral gas injection chimneysOptional[1]—
Source head tilt gimbalsOptional[1]—
Integral shuttersOptional[1]—
Power suppliesOptional[1]—
Modular magnet arrayYes[1]—
Configuration—Insulator,Side Match,Hdp-Cvd Ultima Plus[2]
Asset number—146526[2]
Make—Applied Materials[2]
Model—0020 12458[2]

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Sources (2)Every fact above is drawn from these public sources
  1. [1]web.archive.orgweb.archive.org
  2. [2]inventory listing