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AIX 2600 G 3 MOCVD Reactorversus0020 17485 Part

Aixtron AIX 2600 G 3 MOCVD Reactor, Applied Materials 0020 17485 Part, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0020 17485 PartApplied Materials
OEMAixtronApplied Materials
CategoryDepositionDeposition
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyAixtron AIX 2600Applied Materials 0020 17485 Part
Specifications
Configuration8 x 2", x 3", x 4"[1]Strap, RF Out 2 Balanced Coil Match, Hdp[4]
Wafer sizes2, 3, 4 inch[1]—
Wafer capacity8 x 2", 8 x 3", 8 x 4"[1]—
Substrate materialsGaAs or InP[3]—
Hydride source count7 or 9[1]—
Metal-organic source count8 or 9[1]—
OEMAixtron[1]—
ModelAIX 2600 G 3[1]—
Equipment typeMOCVD Reactor[1]—
Hydride / metal-organic configuration7 hydrides and 8 metal-organics; or 9 hydrides and 9 metal-organics[3]—

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Sources (4)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing
  3. [3]waferpedia.comwaferpedia.com
  4. [4]inventory listing