Waferpedia

Comparison ledger

11980 Aversus400

Agilent 11980 A, Wyko 400, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
11980 AAgilent
400Wyko
OEMAgilentWyko
CategoryPrecision OpticsPrecision Optics
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyAgilent 11980 AWyko 400
Specifications
Wavelength Range1250-1600 nm[1]—
Type—Laser interferometer[2]
Test aperture—100 mm (4 in.)[2]
Zoom—Full 6X zoom[2]
Display/output—Live fringe output[2]
Alignment system—Simple twin spot alignment system[2]
Measurement capability—Phase shifting capability[2]
Wavelength sources—633 nm or 1.06 µm[2]
Optional apertures—25.4 mm (1 in.) and 152.4 mm (6 in.)[2]
Accuracy—Peak-to-valley accuracy of l/100[2]
Repeatability—l/300[2]
Accuracy (peak-to-valley)—λ/100[3]
Output—live fringe output[3]
Phase shifting capability—yes[3]

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Sources (3)Every fact above is drawn from these public sources
  1. [1]waferpedia.comwaferpedia.com
  2. [2]web.archive.orgweb.archive.org
  3. [3]web.archive.orgweb.archive.org