Waferpedia

Comparison ledger

11980 AversusProfilm3D

Agilent 11980 A, Filmetrics Profilm3D, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
11980 AAgilent
Profilm3DFilmetrics
OEMAgilentFilmetrics
CategoryPrecision OpticsPrecision Optics
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyAgilent 11980 AFilmetrics Profilm3D
Cited variants—
  • Profilm3D-200[1]
Specifications
Wavelength Range1250-1600 nm[2]—
manufacturer—Filmetrics[3]
model—Profilm3D[3]
instrument type—optical profiler[3]
measurement method—profilometry[3]
step-height accuracy—0.7% for an 8 µm step[3]
maximum silicon thickness stated on source page for tabletop/mapping/production systems—up to 2 mm thick[3]

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Sources (3)Every fact above is drawn from these public sources
  1. [1]kla.comkla.com
  2. [2]waferpedia.comwaferpedia.com
  3. [3]web.archive.orgweb.archive.org