Comparison ledger
Agilent 11980 A, Filmetrics F54, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 11980 AAgilent | F54Filmetrics |
|---|---|---|
| OEM | Agilent | Filmetrics |
| Category | Precision Optics | Precision Optics |
| Wafer size | — | 200mm |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Agilent 11980 A | Filmetrics F54 |
| Specifications | ||
| Wavelength Range | 1250-1600 nm[1] | — |
| instrument type | — | spectroscopic ellipsometer[2] |
| measurement | — | thicknesses and refractive indices of thin films[2] |
| substrate size | — | Up to 200 mm wafers[2] |
| light source | — | Xenon Arc lamp 75W[2] |
| wavelength range | — | 210 nm to 2500 nm[2] |
| spot size without focusing probes | — | 3 to 4 mm beam diameter[2] |
| spot size with focusing probes | — | 120 microns beam diameter[2] |
| stage | — | Motorized XY stage mapping[2] |
| z stage | — | Motorized Z and Autofocus[2] |
| tilt alignment | — | Automatic Tilt Alignement Routine[2] |
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