Waferpedia

Comparison ledger

966 Wafer Mountingversus0010-03254 E Chuck

ADT 966 Wafer Mounting, Applied Materials 0010-03254 E Chuck, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0010-03254 E ChuckApplied Materials
OEMADTApplied Materials
Category——
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
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Control system——
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FamilyADT 966 Wafer Mounting—
Cited variants—
Specifications
Supported tapesDicing Blue-tapes / UV tapes[1]—
Max workpiece sizeØ 200 mm (8 inch)[1]—
Supported film framesDTF 2-8-1; DTF 2-6-1; 350-103; 350-104; DTF-2-12; SEMI-G74[1]—
Machine dimensions (W x D x H)420 x 860 x 370 mm[1]—
Approx. machine weight45 kg[1]—
Temperature-controlled chuck heaterYes[1]—
Built-in vacuum holderYes[1]—
UV back tape collectorYes[1]—
Anti-static rollerYes[1]—
Sources (1)Every fact above is drawn from these public sources
  1. [1]adt-co.comadt-co.com