Comparison ledger
Accretech , Tokyo Semitsu Kogaku (TSK) UF3000, Disco DCS1440, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | , Tokyo Semitsu Kogaku (TSK) UF3000Accretech | DCS1440Disco |
|---|---|---|
| OEM | Accretech | Disco |
| Category | — | — |
| Wafer size | Wafer Equipment | 100mm |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Accretech , Tokyo Semitsu Kogaku (TSK) UF3000 | Disco DCS1440 |
| Specifications | ||
| Wafer size | Wafer Equipment[1] | — |
| Currently Configured for | 300mm[1] | — |
| With Chiller | SCU-600B[1] | — |
| Section 1 | Tool General Information[1] | — |
| Section 2 | Tool Specific Information[1] | — |
| Manufacturer | Accretech, Tokyo Semitsu Kogaku (TSK)[1] | — |
| Model | UF3000[1] | — |
| Category | Wafer Equipment[1] | — |
| Equipment type | Wafer Prober[1] | — |
| Tool status | In production[1] | — |
| Tool location | Cleanroom[1] | — |
| Chiller | SCU-600B[1] | — |
| Vendor tool serial number | F24006MZ[1] | — |
| Micron MISTI/LID number | FE3SKAA300(TMM)[1] | — |
| Year | 2004[2] | — |
| Quantity | 9[3] | — |
| Short description | Fully Automated Prober[3] | — |
| Version | 300 mm[3] | — |
| Nickel chuck | 12 inch[3] | — |
| Front loading | 300 mm single FOUP loading[3] | — |
| Robot blade | Dual ceramic robot blade[3] | — |
| Software version | S5.0FC4[3] | — |
| Loader type | TSK[3] | — |
| Chuck temperature range | 30~150℃[3] | — |
| OCR camera type | Type6[3] | — |
| Auto card change | Yes[3] | — |
| Needle cleaning unit | 150 mm x 150 mm ceramics pad[3] | — |
| Manipulator | Hinge, MHF4000[3] | — |
| Test system interface | AL6050 & Focus3000[3] | — |
| Includes | Printer[3] | — |
| Mentioned function | — | atomizing cleaning[4] |
| Associated equipment | — | DAG810 automatic surface grinder[4] |
| Maximum workpiece size | — | Φ8 inch[5] |
| Application frame | — | 2-8-1[6] |
| Table RPM | — | 100 to 3,000 min⁻¹[5] |
| Setting time for cleaning/drying | — | 0 to 999 sec[5] |
| Cleaning nozzle speed | — | 1 to 37.5 °/sec[5] |
| Cleaning range | — | Φ365 mm (up to 250×250 mm)[5] |
| Cleaning pressure range | — | 2.3 to 11.8 MPa[5] |
| Equipment dimensions (W×D×H) | — | 400 × 600 × 1,220 mm[5] |
| Dry mass | — | Approx. 124 kg[5] |
| Maximum square workpiece (optional) | — | 250×250 mm[5] |