Comparison ledger
ABM -407B-2-S-CE-S293 Robot, Tenney Lunaire TJR, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | Lunaire TJRTenney | |
|---|---|---|
| OEM | ABM | Tenney |
| Category | — | — |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | ABM -407B-2-S-CE-S293 Robot | Tenney Lunaire TJR |
| Specifications | ||
| Model | ABM-407B-2-S-CE-S293[1] | TJR[3] |
| Description | ROBOT[1] | Chamber[2] |
| Refurbished RTP RTA | AG Associates 4100, 4108, 8108, 8800, 8800i,210, 310, 410, 610, 610I, MPT RTP-600S, 800S, RTP-3000[1] | — |
| KLA-Tencor Spare Parts and Service | RS-35C,RS-55,RS-75,RS-100,UV-1050,UV-1080,UV-1250,UV-1280,ASET F5 / F5X,AIT Systems,HRP-220 Stylus Profiler[1] | — |
| Refurbished Isotropic Plasma Etcher | Matrix, Tegal, Lam Research, Branson/IPC, PlasmaTherm[1] | — |
| Refurbished PECVD, ALD Equipment | Cambridge, Oxford PlasmaLab , Plasma-Therm, STS/SPTS, AMAT[1] | — |
| Refurbished Mask Aligner | Canon Neutronix PLA501/545, Suss MA200CC, MA8BA8 GEN3, MA8BA8 GEN2, MA8BA8, MA200E[1] | — |
| Refurbished Bonding | SUSS SB6E, SUSS SB8E, EVG 620 BA, EVG EV501, West Bond 7200AR 7400A[1] | — |
| Refurbished Wafer Prober | Electroglas EG 4090u+, EG 4090, EG 2001X, EG 1034X, Cascade PS-21[1] | — |
| Manufacturer | — | Tenney Lunaire[2] |
| Temperature range | — | -66°C to +200°C[3] |
| Control | — | Watlow series 942[3] |
| Cooling | — | Cascade system[3] |
| Minimum tested temperature | — | -66C[3] |
| Tested cooldown | — | 20C to -66C in 83 minutes[3] |
| Power requirement | — | 120V/20A fused, NEMA 5-20R outlet required[3] |
| Interior dimensions | — | 11 in deep, 15 in wide, 12 in high[3] |
| Exterior dimensions | — | 37 in wide, 23 in deep, 26 in high[3] |
| Access port | — | One 2 in on left wall[3] |
| Refrigerant | — | R-404A/R-508B[3] |