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-407B-2-S-CE-S293 RobotversusHiPace 800 + TC 400 Turbo

ABM -407B-2-S-CE-S293 Robot, Pfeiffer HiPace 800 + TC 400 Turbo, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
-407B-2-S-CE-S293 RobotABM
HiPace 800 + TC 400 TurboPfeiffer
OEMABMPfeiffer
Category——
Wafer size——
Process node——
Introduced——
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FamilyABM -407B-2-S-CE-S293 RobotPfeiffer HiPace
Cited variants—
  • HiPace 800, DN 200 ISO-K, TC 400, 24 V DC[1]
  • HiPace 800, DN 200 ISO-K, TC 400, 48 V DC[1]
  • HiPace 800, DN 200 CF-F, TC 400, 24 V DC[1]
  • HiPace 800, DN 200 CF-F, TC 400, 48 V DC[1]
  • HiPace 800, DN 200 ISO-F, TC 400, 24 V DC[1]
  • HiPace 800, DN 200 ISO-F, TC 400, 48 V DC[1]
  • TC 400, standard[1]
  • TC 400 PB, Profibus[1]
  • TC 400 E74, according to Semi E74[1]
  • TC 400 DN, DeviceNet[1]
  • TC 400 EC, EtherCAT[1]
Specifications
ModelABM-407B-2-S-CE-S293[2]—
DescriptionROBOT[2]—
Refurbished RTP RTAAG Associates 4100, 4108, 8108, 8800, 8800i,210, 310, 410, 610, 610I, MPT RTP-600S, 800S, RTP-3000[2]—
KLA-Tencor Spare Parts and ServiceRS-35C,RS-55,RS-75,RS-100,UV-1050,UV-1080,UV-1250,UV-1280,ASET F5 / F5X,AIT Systems,HRP-220 Stylus Profiler[2]—
Refurbished Isotropic Plasma EtcherMatrix, Tegal, Lam Research, Branson/IPC, PlasmaTherm[2]—
Refurbished PECVD, ALD EquipmentCambridge, Oxford PlasmaLab , Plasma-Therm, STS/SPTS, AMAT[2]—
Refurbished Mask AlignerCanon Neutronix PLA501/545, Suss MA200CC, MA8BA8 GEN3, MA8BA8 GEN2, MA8BA8, MA200E[2]—
Refurbished BondingSUSS SB6E, SUSS SB8E, EVG 620 BA, EVG EV501, West Bond 7200AR 7400A[2]—
Refurbished Wafer ProberElectroglas EG 4090u+, EG 4090, EG 2001X, EG 1034X, Cascade PS-21[2]—
P/N—PM P 04 301[3]
Input—24V / 48V, 15A[3]
Output—0-48V, 12A, 0-1000Hz[3]
Pump type—Turbomolecular vacuum pump[1]
Product name—HiPace 800 Turbomolecular Vacuum Pump[1]
Drive unit—TC 400 electronic drive unit[1]
High vacuum flange variants—DN 200 ISO-K, DN 200 CF-F, DN 200 ISO-F[1]
Supply voltage variants—24 V DC or 48 V DC[1]
Drive unit input—24V / 48V, 15A[3]
Drive unit output—0-48V, 12A, 0-1000Hz[3]
Part number—PM P 04 301[3]
TC 400 drive unit variants—Standard, Profibus, Semi E74, DeviceNet, EtherCAT[1]
-407B-2-S-CE-S293 Robot entryHiPace 800 + TC 400 Turbo entryAsk about these tools →Share experience with this comparison →
Sources (3)Every fact above is drawn from these public sources
  1. [1]pfeiffervacuum.compfeiffervacuum.com
  2. [2]dealer listingsemistarcorp.com
  3. [3]inventory listing