Comparison ledger
ABM -407B-2-S-CE-S293 Robot, ESPEC TSA 203 EL W Thermal Shock, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | ||
|---|---|---|
| OEM | ABM | ESPEC |
| Category | — | — |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | ABM -407B-2-S-CE-S293 Robot | ESPEC TSA |
| Specifications | ||
| Model | ABM-407B-2-S-CE-S293[1] | TSA 203 EL W[2] |
| Description | ROBOT[1] | — |
| Refurbished RTP RTA | AG Associates 4100, 4108, 8108, 8800, 8800i,210, 310, 410, 610, 610I, MPT RTP-600S, 800S, RTP-3000[1] | — |
| KLA-Tencor Spare Parts and Service | RS-35C,RS-55,RS-75,RS-100,UV-1050,UV-1080,UV-1250,UV-1280,ASET F5 / F5X,AIT Systems,HRP-220 Stylus Profiler[1] | — |
| Refurbished Isotropic Plasma Etcher | Matrix, Tegal, Lam Research, Branson/IPC, PlasmaTherm[1] | — |
| Refurbished PECVD, ALD Equipment | Cambridge, Oxford PlasmaLab , Plasma-Therm, STS/SPTS, AMAT[1] | — |
| Refurbished Mask Aligner | Canon Neutronix PLA501/545, Suss MA200CC, MA8BA8 GEN3, MA8BA8 GEN2, MA8BA8, MA200E[1] | — |
| Refurbished Bonding | SUSS SB6E, SUSS SB8E, EVG 620 BA, EVG EV501, West Bond 7200AR 7400A[1] | — |
| Refurbished Wafer Prober | Electroglas EG 4090u+, EG 4090, EG 2001X, EG 1034X, Cascade PS-21[1] | — |
| Configuration | — | High temp exposure range：+50 ~ +200*C[2] |
| High temp exposure range | — | +50 ~ +200°C[2] |
| Low temp exposure range | — | -65 ~ 0°C[2] |
| Interior Volume | — | 7 cu. ft. (200 Liters)[3] |
| Interior Dimensions (W x D x H) | — | 25.5" x 26.4" x 18" (650 x 670 x 460 mm)[3] |
| Exterior Dimensions (W x D x H) | — | 61" x 70" x 75" (1550 x 1770 x 1900 mm)[3] |
| Temperature Range | — | -65 to 200°C (-85 to 392°F)[3] |
| Test Performance Example | — | Two Zone, upstream air, Range: -40 to 125°C, Recovery: 5 min., Load: 16 kg (plastic ICs + basket)[3] |
| Power | — | 208V (±5%) 3ph 60Hz, 125 Service Amps (110 FLA), Water-cooling[3] |
| Peak Demand | — | 20 GPM w/ water at 32°C[3] |
| Maximum Sound Level (1 meter away) | — | 62 dBA[3] |
| Temperature Fluctuation (at control sensor) | — | ±0.5°C[3] |
| Refrigeration System | — | Cascade 10hp Scroll[3] |
| Operation | — | Two-zone operation only[3] |
| Vintage | — | 2018[2] |
| Equipment type | — | thermal shock chamber[2] |